Ultrathin titanium and barium oxide films were grown on SrTiO(001) substrate surfaces via Ti/Ba deposition and oxidation. When Ti is deposited onto the SrTiO(001) surface, it forms a series of SrTiO surface reconstructions such as c(4 × 2), fenced(sqrt(5) × sqrt(5)) - R 26.6, (6 × 2) and (9 × 2), which can be controlled by varying the Ti concentration. Epitaxial anatase TiO(001) islands with (1 × 3) and (1 × 5) reconstructions are formed by further increasing the Ti deposition amount and post-annealing. The initial growth of BaO thin films depends on the surface condition of the substrate. BaO nanoparticles form on reconstructed SrTiO(001), while a locally ordered c(4 × 4) BaO structure is observed on the disordered sample surface. Co-deposition of Ba and Ti on SrTiO(001) results in phase separation with the deposited Ba forming BaO nanoparticles and the Ti contributing to Ti-rich SrTiO surface reconstructions. No formation of BaTiO is observed at the initial growth stages between 0.3 monolayer (ML) and 1.8 MLs. © 2013 Elsevier B.V. All rights reserved.