We report on the investigation of surface acoustic wave (SAW) fields by scanning acoustic force microscopy (SAFM), reaching submicron lateral resolution. The SAFM is based on a standard atomic force microscope and utilizes the non-linear force curve in the sense of a mechanical diode. The surface oscillation therefore leads to a shift of the cantilever's rest position. With SAFM we investigated SAW transducers operating at frequencies above 600 MHz. We measured the dynamic behaviour of the wave pattern within the transducers when sweeping the frequency and found a local influence of mass loading on the standing SAW amplitude. Furthermore, the first images of SAW diffraction and scattering are shown. © 1997 by John Wiley & Sons, Ltd.
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